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Ultra-violet light assisted reactive RF magnetron sputtering deposition of AlN thin films at room temperature

✍ Scribed by Bin Feng; Shurong Dong; Hao Jin; Jian Zhou; Yi Yang; Tianling Ren; Jikui Luo; Demiao Wang

Book ID
113795786
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
886 KB
Volume
79
Category
Article
ISSN
0167-577X

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## Abstract Hexagonal aluminium nitride (AlN) and zinc oxide (ZnO) thin films have been deposited by DC and RF reactive magnetron sputtering at room temperature. For a first set of samples, sputtered AlN films were deposited on silicon ZnO substrate. For a second set, ZnO films were deposited on Al