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Structure and properties of TiB2thin films deposited at low temperatures using RF magnetron sputtering

✍ Scribed by Wei Dai; Tongjun Zhang; Junyou Yang; Rongxing Sun; Juliang Xu


Book ID
107403705
Publisher
Wuhan University of Technology
Year
2008
Tongue
English
Weight
489 KB
Volume
23
Category
Article
ISSN
1000-2413

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Low-Temperature Synthesis of Gallium Nit
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The technologies of fabrication of thin film phosphors based on gallium nitride using rf-magnetron sputtering are developed and properties of films are studied. Spectral parameters of rf-discharge plasma emission of nitrogen used as a working gas are investigated. The dependence of GaN thin film dep