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Reactive ion beam etching characteristics of LiNbO3

✍ Scribed by Ren Congxin; Yang Jie; Zheng Yanfang; Chen Lizhi; Chen Guoliang; Tsou Shichang

Book ID: 114168182
Publisher: Elsevier Science
Year: 1987
Tongue: English
Weight: 962 KB
Volume: 19-20
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(87)80202-1

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