Implantations of Xe +, Ar + and N + ions at room temperature cause radiation damage, volume expansion and near-surface decomposition in LiNbO 3. Precipitates of Li20 are formed in surface regions when exposed to the atmosphere. Amorphization induced by heavy damage is observed in the ionimplanted re
β¦ LIBER β¦
Ion beam enhanced etching of LiNbO3
β Scribed by F. Schrempel; Th. Gischkat; H. Hartung; E.-B. Kley; W. Wesch
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 407 KB
- Volume
- 250
- Category
- Article
- ISSN
- 0168-583X
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