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Ion beam etching equipment

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📜 SIMILAR VOLUMES

Electrotech Associates: ion beam etching

📂 Article 📅 1972 🏛 Elsevier Science 🌐 English ⚖ 160 KB

Ion beam enhanced etching of LiNbO3

✍ F. Schrempel; Th. Gischkat; H. Hartung; E.-B. Kley; W. Wesch 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 407 KB

Ion beam etching InP at elevated tempera

✍ AP Webb; RS Sussmann 📂 Article 📅 1986 🏛 Elsevier Science 🌐 English ⚖ 698 KB

Application of ion-beam etching in micro

✍ K. Ehrig; R. Schlenk; M. Falz; F. Bigl; H. Neumann; B. Faust 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 107 KB

Ion beam etching using saddle field sour

✍ P.J. Revell; A.C. Evans 📂 Article 📅 1981 🏛 Elsevier Science 🌐 English ⚖ 589 KB

Gas-assisted etching with focused ion be

✍ J.David Casey Jr.; Andrew F. Doyle; Randall G. Lee; Diane K. Stewart; Harald Zim 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 972 KB