✦ LIBER ✦

Ion beam etching InP at elevated temperatures

✍ Scribed by AP Webb; RS Sussmann

Publisher: Elsevier Science
Year: 1986
Tongue: English
Weight: 698 KB
Volume: 36
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(86)90268-x

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Determination of ion beam etching damage

Determination of ion beam etching damage on InP by spectroscopic ellipsometry

✍ H.W. Dinges; B. Kempf; H. Burkhard; R. Göbel 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 270 KB

Dynamic plasticity experiments on alumin

Dynamic plasticity experiments on aluminium cantilever beams at elevated temperature

✍ S.R. Bodner; W.G. Speirs 📂 Article 📅 1963 🏛 Elsevier Science 🌐 English ⚖ 904 KB

Shallow n+ junction formation using ion

Shallow n+ junction formation using ion mixing of tungsten at elevated temperatures

✍ H. Jiang; C.S. Petersson; G. Holmén 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 645 KB

Symmetric InP mirror facets fabricated b

Symmetric InP mirror facets fabricated by selective chemical beam epitaxy on reactive-ion-etched sidewalls

✍ M. Gotoda; H. Sugimoto; S. Maruno; T. Isu; W. Susaki; M. Nunoshita 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 446 KB

Ion-beam mixing in silicon and germanium

Ion-beam mixing in silicon and germanium at low temperatures

✍ G.J. Clark; A.D. Marwick; D.B. Poker 📂 Article 📅 1983 🏛 Elsevier Science ⚖ 599 KB

Nanofabrication of GaInAsP/InP 2-dimensi

Nanofabrication of GaInAsP/InP 2-dimensional photonic crystals by a methane-based reactive ion beam etching

✍ Toshihiko Baba; Naohisa Kamizawa; Mitsutaka Ikeda 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 466 KB

As a 2-dimensional photonic crystal, columns periodically arranged with nanometer order pitches have been formed on GalnAsP/InP wafer, aiming at the effective control of spontaneous emission without discrimination of nonradiative process. For the fine and low damage etching of columns, a reactive io