✦ LIBER ✦
Shallow n+ junction formation using ion mixing of tungsten at elevated temperatures
✍ Scribed by H. Jiang; C.S. Petersson; G. Holmén
- Publisher
- Elsevier Science
- Year
- 1990
- Tongue
- English
- Weight
- 645 KB
- Volume
- 192
- Category
- Article
- ISSN
- 0040-6090
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