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Application of ion-beam etching in microelectronics

✍ Scribed by K. Ehrig; R. Schlenk; M. Falz; F. Bigl; H. Neumann; B. Faust


Publisher
Elsevier Science
Year
1987
Tongue
English
Weight
107 KB
Volume
37
Category
Article
ISSN
0042-207X

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