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Ion-beam etching and sputtering of polytetrafluoroethylene (PTFE)

✍ Scribed by M. Rost; H.-J. Erler; H. Giegengack; O. Fiedler; Chr. Weissmantel


Publisher
Elsevier Science
Year
1974
Tongue
English
Weight
494 KB
Volume
20
Category
Article
ISSN
0040-6090

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Ion beam ablation of polytetrafluoroethy
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Polytetrafluoroethylene (PTFE) was irradiated with 300 keV Ar / ions to the fluences of 1 1 10 14 to 1 1 10 16 cm 02 ; the PTFE structural changes induced by the ion irradiation were studied by X-ray diffraction and UV-vis and IR spectroscopies. The electrical conductivity of the ion beam modified P