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Etching of plasma-polymerized tetrafluoroethylene, polytetrafluoroethylene, and sputtered polytetrafluoroethylene induced by atomic oxygen [O(3P)]

✍ Scribed by Theodore Wydeven; Morton A. Golub; Narcinda R. Lerner


Publisher
John Wiley and Sons
Year
1989
Tongue
English
Weight
618 KB
Volume
37
Category
Article
ISSN
0021-8995

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