✦ LIBER ✦

Focused ion beam repair in microelectronics

✍ Scribed by Pierre Sudraud; Gérard Benassayag; Michel Bon

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Custom IC repairs using focused ion beam

✍ R. Clampitt; R. Watkins; J. Whitaker 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 657 KB

Focused-ion-beam-induced tungsten deposi

✍ F.C. van den Heuvel; M.H.F. Overwijk; E.M. Fleuren; H. Laisina; K.J. Sauer 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 340 KB

Focused ion beam repair techniques for c

✍ J.R.A. Cleaver; H. Ahmed; P.J. Heard; P.D. Prewett; G.J. Dunn; H. Kaufmann 📂 Article 📅 1985 🏛 Elsevier Science 🌐 English ⚖ 743 KB

Focused ion beam technology

✍ Kenji Gamo 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 519 KB

Reliability of a focused ion beam repair

✍ R Van Camp; K Van Doorselaer; I Clemminck 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 257 KB

Application of ion-beam etching in micro

✍ K. Ehrig; R. Schlenk; M. Falz; F. Bigl; H. Neumann; B. Faust 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 107 KB