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Reliability of a focused ion beam repair on digital cmos circuits

✍ Scribed by R Van Camp; K Van Doorselaer; I Clemminck

Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
257 KB
Volume
36
Category
Article
ISSN
0026-2714

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πŸ“œ SIMILAR VOLUMES

Fabrication of high IcΓ—Rn YBCO-Josephson
Fabrication of high IcΓ—Rn YBCO-Josephson-junctions on MgO- substrates using a focused-ion-beam system
✍ Ch. Neumann; K. Yamaguchi; K. Hayashi; K. Suzuki; Y. Enomoto; S. Tanaka πŸ“‚ Article πŸ“… 1993 πŸ› Elsevier Science 🌐 English βš– 970 KB

We report on the fabrication of YBCO-Josephson-junctions using a narrow-focused Ga-ion beam to damage the MgO-substrates prior to film deposition. On top of the micro-areas damaged by the ion-beam, the as-grown YBCO-film shows weak-link properties. The final junction was achieved using photolithogra