Fabrication of high Ic×Rn YBCO-Josephson-junctions on MgO- substrates using a focused-ion-beam system
✍ Scribed by Ch. Neumann; K. Yamaguchi; K. Hayashi; K. Suzuki; Y. Enomoto; S. Tanaka
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 970 KB
- Volume
- 210
- Category
- Article
- ISSN
- 0921-4534
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✦ Synopsis
We report on the fabrication of YBCO-Josephson-junctions using a narrow-focused Ga-ion beam to damage the MgO-substrates prior to film deposition. On top of the micro-areas damaged by the ion-beam, the as-grown YBCO-film shows weak-link properties. The final junction was achieved using photolithography and Ar-milling to fabricate a 5 urn wide superconducting line over the damaged area. This method, using only standard techniques, leads to reproducible junctions with a high I,XR, product, which is important for some applications and indicates a good barrier quality.