✦ LIBER ✦
A new VLSI diagnosis technique: focused ion beam assisted multi-level circuit probing : Y. Mashiko, H. Morimoto, H. Koyama, S. Kawazu, T. Kaito and T. Adachi. Annual Proceedings of the Reliability Physics Symposium, San Diego, U.S.A., p. 111 (1987)
- Publisher
- Elsevier Science
- Year
- 1988
- Tongue
- English
- Weight
- 126 KB
- Volume
- 28
- Category
- Article
- ISSN
- 0026-2714
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