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Focused ion beam repair techniques for clear and opaque defects in masks

✍ Scribed by J.R.A. Cleaver; H. Ahmed; P.J. Heard; P.D. Prewett; G.J. Dunn; H. Kaufmann

Publisher: Elsevier Science
Year: 1985
Tongue: English
Weight: 743 KB
Volume: 3
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(85)90034-6

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## Abstract The surface properties of materials are believed to control most of the biological reactions toward implanted materials. To study the surface structure, elemental distribution, and morphology, using transmission electron microscopy (TEM) techniques, thin foils of the surface (in cross‐s