Reactive ion beam etching of lithium tantalate and its application for pyroelectric infrared detectors

✍ Scribed by Corinna Plehnert; Volkmar Norkus; Silke Möhling; Alan Hayes

• Publisher: Elsevier Science
• Year: 1995
• Tongue: English
• Weight: 374 KB
• Volume: 74-75
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/0257-8972(94)08207-3