Surface chemistry and optimization of focused ion beam iodine-enhanced etching of indium phosphide

✍ Scribed by Victor Callegari; Philipp M. Nellen; Tianhe Yang; Roland Hauert; Ulrich Müller; Francisco Hernández-Ramírez; Urs Sennhauser

• Publisher: Elsevier Science
• Year: 2007
• Tongue: English
• Weight: 658 KB
• Volume: 253
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2007.05.026