✦ LIBER ✦
7286. Molecular-beam study of gas-surface chemistry in the ion-assisted etching of silicon with atomic and molecular hydrogen and chlorine: Mei-Chen Chuang and J W Coburn,J Vac Sci Technol, A8, 1990, 1969–1976
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 153 KB
- Volume
- 42
- Category
- Article
- ISSN
- 0042-207X
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