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Radiation hardness improvement of separation-by-implantation-of-oxygen/silicon-on-insulator material by nitrogen ion implantation

✍ Scribed by Enxia Zhang; Jiayin Sun; Jing Chen; Zhengxuan Zhang; Xi Wang; Ning Li; Guoqiang Zhang; Zhongli Liu

Book ID: 107453465
Publisher: Springer US
Year: 2005
Tongue: English
Weight: 83 KB
Volume: 34
Category: Article
ISSN: 0361-5235
DOI: 10.1007/s11664-005-0206-2

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