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Properties of amorphous carbon nitride prepared by RF reactive sputtering

✍ Scribed by Gharbi, R.; Karoui, M. B.; Fathallah, M.; Tresso, E.

Book ID: 126998874
Publisher: Taylor and Francis Group
Year: 2007
Tongue: English
Weight: 287 KB
Volume: 87
Category: Article
ISSN: 1478-6435
DOI: 10.1080/14786430701606998

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