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Study on amorphous carbon nitride film prepared by facing target sputtering

✍ Scribed by J.R. Shi; Y.J. Xu; J. Zhang

Book ID: 108287787
Publisher: Elsevier Science
Year: 2005
Tongue: English
Weight: 590 KB
Volume: 483
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2005.01.019

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