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ITO films prepared by facing target sputtering system

✍ Scribed by Kikuo Tominaga; Tetsuya Ueda; Takahiro Ao; Masahiro Kataoka; Ichiro Mori

Book ID: 113205296
Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 521 KB
Volume: 281-282
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(96)08611-7

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