Nanoindentation hardness and compressive stress in amorphous carbon nitride thin films prepared by unbalanced magnetron sputter-deposition were studied. The coating hardness and compressive stress were found to be strongly dependent on processing parameters such as substrate bias and nitrogen partia
Effects of heat treatment on amorphous carbon nitride prepared by reactive magnetron sputtering
β Scribed by X.C. Xiao; Y.W. Li; W.H. Jiang; L.X. Song; X.F. Hu
- Publisher
- Elsevier Science
- Year
- 2000
- Tongue
- English
- Weight
- 186 KB
- Volume
- 61
- Category
- Article
- ISSN
- 0022-3697
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β¦ Synopsis
The amorphous CN x powders were prepared by reactive DC magnetron sputtering. Based on the DTA-TG analysis, a characteristic temperature (1440ΠC) was determined at which heat treatment was employed to crystallize the amorphous powders. Subsequent structural and compositional analysis were carried out on the heat-treated samples by using XRD, scanning Auger. The powder diffraction pattern revealed that a-C 3 N 4 is the main crystalline thermodynamically stable phase in the predicted crystalline carbon nitrides. Nano crystallites were observed with compositions very close to that of the C 3 N 4 crystal.
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