The advantages of ion etching over wet chemical etching are demonstrated, e,g. structure resolution in the region of the etching depth, no undercutting, excellent reproducibility and high adherence of small striplines.
Progress in instrumentation, data reduction, and depth profiles in Auger electron spectroscopy
โ Scribed by Paul H. Holloway
- Publisher
- Elsevier Science
- Year
- 1986
- Tongue
- English
- Weight
- 499 KB
- Volume
- 26
- Category
- Article
- ISSN
- 0169-4332
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๐ SIMILAR VOLUMES
In-depth composition profiles of the an&c oxide films grown on Al (1 I1 ), (I 10) and (100) single crystal electrodes in ammonium borate were studied by Auger electron spectroscopy with Ar ion etching. The oxide film had the composition of Ai,O, as referenced to an authentic a-Al,O, single crystal.
## Abstract This standard is issued under the fixed designation E1127; the number immediately following the designation indicates the year of original adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. A superscript epsilo