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Depth resolution and surface roughness effects in sputter profiling of NiCr multilayer sandwich samples using Auger electron spectroscopy

✍ Scribed by S. Hofmann; J. Erlewein; A. Zalar


Publisher
Elsevier Science
Year
1977
Tongue
English
Weight
479 KB
Volume
43
Category
Article
ISSN
0040-6090

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