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In-depth composition profile of anodic oxide films on aluminium studied by auger electron spectroscopy

✍ Scribed by S. Matsuzawa; N. Baba; S. Tajima


Publisher
Elsevier Science
Year
1979
Tongue
English
Weight
286 KB
Volume
24
Category
Article
ISSN
0013-4686

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✦ Synopsis


In-depth composition profiles of the an&c oxide films grown on Al (1 I1 ), (I 10) and (100) single crystal electrodes in ammonium borate were studied by Auger electron spectroscopy with Ar ion etching. The oxide film had the composition of Ai,O, as referenced to an authentic a-Al,O, single crystal. The Auger electron energy and peak shapes of Al and 0 in the oxide film agreed with those of a-Al,O1 crystal.


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