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Factors affecting depth resolution and chemistry in Auger electron spectroscopy depth profiles of Mos and MNOS structures

✍ Scribed by Y.E. Strausser; C.R. Helms; S. Schwarz; W.E. Spicer


Publisher
Elsevier Science
Year
1978
Tongue
English
Weight
64 KB
Volume
53
Category
Article
ISSN
0040-6090

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