✦ LIBER ✦

Progress in E-beam mask making for optical and x-ray lithography

✍ Scribed by Hans C. Pfeiffer; Timothy R. Groves

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

High resolution e-beam lithography for X

✍ S. Pongratz; K. Reimer; R. Demmeler; Ch. Ehrlich 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 314 KB

Basic study of optical pattern placement

✍ T. Sugihara; T. Arakawa; K. Okada; K. Kodama; H. Izawa 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 307 KB

E-beam written optically transparent x-r

✍ Ch. Ehrlich; B. Breithaupt; R. Demmeler; E.P. Jacobs; C. Köhler; K. Kohlmann; M. 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 332 KB

DUV-E-beam Mix and Match lithography in

✍ B.J. Vleeming; J.L.T.R. Leene; E. van der Drift; J. Romijn 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 791 KB

Development of a fast and high resolutio

✍ I. Raptis; M. Gentili; E. Di Fabrizio; R. Maggiora; M. Baciocchi; L. Grella; L. 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 823 KB

B-Si masks for storage ring X-ray lithog

📂 Article 📅 1985 🏛 Elsevier Science 🌐 English ⚖ 132 KB