✦ LIBER ✦
Development of a fast and high resolution e-beam process for the fabrication of X-ray masks with CD of 0.15 μm
✍ Scribed by I. Raptis; M. Gentili; E. Di Fabrizio; R. Maggiora; M. Baciocchi; L. Grella; L. Mastrogiacomo
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 823 KB
- Volume
- 27
- Category
- Article
- ISSN
- 0167-9317
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