✦ LIBER ✦
E-beam written optically transparent x-ray masks: Four levels for an industrial VLSI chip with megabit design rules
✍ Scribed by Ch. Ehrlich; B. Breithaupt; R. Demmeler; E.P. Jacobs; C. Köhler; K. Kohlmann; M. Petschner; K. Reimer
- Publisher
- Elsevier Science
- Year
- 1992
- Tongue
- English
- Weight
- 332 KB
- Volume
- 17
- Category
- Article
- ISSN
- 0167-9317
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