✦ LIBER ✦
DUV-E-beam Mix and Match lithography in a single mask for fabricating a multi-terminal SQUID device
✍ Scribed by B.J. Vleeming; J.L.T.R. Leene; E. van der Drift; J. Romijn
- Publisher
- Elsevier Science
- Year
- 1996
- Tongue
- English
- Weight
- 791 KB
- Volume
- 30
- Category
- Article
- ISSN
- 0167-9317
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