✦ LIBER ✦
B-Si masks for storage ring X-ray lithography : R. E. Acosta, J. R. Maldonado, L. K. Towart and J. M. Warlaumont. Solid St. Technol. 205 (October 1984)
- Publisher
- Elsevier Science
- Year
- 1985
- Tongue
- English
- Weight
- 132 KB
- Volume
- 25
- Category
- Article
- ISSN
- 0026-2714
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