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Profile evolution during ion beam etching of germanium targets

✍ Scribed by I.H. Wilson; S.S. Todorov; D.S. Karpuzov

Publisher: Elsevier Science
Year: 1983
Weight: 807 KB
Volume: 209-210
Category: Article
ISSN: 0167-5087
DOI: 10.1016/0167-5087(83)90851-7

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