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Wedge etching by anodic oxidation and determination of shallow boron profile by ion beam analysis

✍ Scribed by J. Gyulai; G. Battistig; T. Lohner; Z. Hajnal

Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 254 KB
Volume: 266
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2007.12.112

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