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Atomic excitations during ion beam sputtering of YBa2Cu3O7 targets

โœ Scribed by A.H. Dogar; A. Qayyum


Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
197 KB
Volume
247
Category
Article
ISSN
0168-583X

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๐Ÿ“œ SIMILAR VOLUMES


In situ thin films of YBa2Cu3O7 prepared
โœ J.-M. Triscone; M.G. Karkut; O. Brunner; L. Antognazza; M. Decroux; ร˜. Fischer ๐Ÿ“‚ Article ๐Ÿ“… 1989 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 347 KB

We have prepared in situ thin films of YBa2fu307 by single target dc reactive magnetron sputtering. By a delicate adjustment of the oxygen partial pressure as well as the total sputtering pressure, we can grow stoichiometric films using a stoichiometric target. This method gives highly reproducible