Microstructure modifications during early stages of ion-beam-assisted film growth of germanium on SiO2

✍ Scribed by Shouleh Nikzad; Harry A. Atwater

• Publisher: Elsevier Science
• Year: 1992
• Tongue: English
• Weight: 357 KB
• Volume: 51
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/0257-8972(92)90246-7