✦ LIBER ✦

Present developments of research MeV Pelletron ion implantation systems

✍ Scribed by G.A. Norton; R.E. Daniel; R.L. Loger; J.B. Schroeder

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Present Position and Future Developments

✍ Rosiński, W. ;Kaczmarek, J. 📂 Article 📅 1989 🏛 John Wiley and Sons 🌐 English ⚖ 525 KB

Design considerations of a VLSI compatib

✍ Norman Turner; Kenneth H. Purser; Manny Sieradzki 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 645 KB

Defect development and dopant location d

✍ H. Krause; R.-H. Flagmeyer; J. Vogt; A. Kling; T. Butz 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 480 KB

Development of an MeV ion beam lithograp

✍ Sergey Gorelick; Tommi Ylimäki; Timo Sajavaara; Mikko Laitinen; A. Sagari A.R.; 📂 Article 📅 2007 🏛 Elsevier Science 🌐 English ⚖ 429 KB

Development of plasma-based ion implanta

✍ Sung-Yong Chun; Akiyoshi Chayahara; Yuji Horino 📂 Article 📅 2001 🏛 Elsevier Science 🌐 English ⚖ 291 KB

Range and standard deviation of ion-impl

📂 Article 📅 1975 🏛 Elsevier Science 🌐 English ⚖ 99 KB