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Design considerations of a VLSI compatible production MeV ion implantation system

✍ Scribed by Norman Turner; Kenneth H. Purser; Manny Sieradzki

Book ID: 113278752
Publisher: Elsevier Science
Year: 1987
Tongue: English
Weight: 645 KB
Volume: 21
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(87)90843-3

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