Development of plasma-based ion implantation (PBII) techniques at Osaka National Research Institute (ONRI)

✍ Scribed by Sung-Yong Chun; Akiyoshi Chayahara; Yuji Horino

• Book ID: 108422816
• Publisher: Elsevier Science
• Year: 2001
• Tongue: English
• Weight: 291 KB
• Volume: 136
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/s0257-8972(00)01005-7