✦ LIBER ✦
Range and standard deviation of ion-implanted phosphorus and boron in silicon : H. Okabayashi and D. Shinoda. NEC Research & Development35, 10 (1974)
- Publisher
- Elsevier Science
- Year
- 1975
- Tongue
- English
- Weight
- 99 KB
- Volume
- 14
- Category
- Article
- ISSN
- 0026-2714
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