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Precursor properties of calcium β-diketonate in vapor phase atomic layer epitaxy

✍ Scribed by J. Aarik; A. Aidla; A. Jaek; M. Leskelä; L. Niinistö


Book ID
103617488
Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
368 KB
Volume
75
Category
Article
ISSN
0169-4332

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