✦ LIBER ✦
Impact of in situ SiN[sub x] layer grown with metal organic vapor phase epitaxy on the electrical and optical properties of AlN/GaN metal insulator semiconductor field effect transistor structures
✍ Scribed by E. Cho; S. Seo; C. Jin; D. Pavlidis; G. Fu; J. Tuerck; W. Jaegermann
- Book ID
- 126654675
- Publisher
- AVS (American Vacuum Society)
- Year
- 2009
- Tongue
- English
- Weight
- 700 KB
- Volume
- 27
- Category
- Article
- ISSN
- 0734-211X
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