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Atomic layer epitaxy of III–V compounds in a hydride vapor phase system

✍ Scribed by Ahopelto, J.; Kattelus, H.P.; Saarilahti, J.; Suni, I.

Book ID: 107790490
Publisher: Elsevier Science
Year: 1990
Tongue: English
Weight: 356 KB
Volume: 99
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(90)90581-5

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