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Precipitation and redistribution of oxygen in Czochralski‐grown silicon

✍ Scribed by Shimura, Fumio; Tsuya, Hideki; Kawamura, Tsutomu

Book ID: 118149968
Publisher: American Institute of Physics
Year: 1980
Tongue: English
Weight: 592 KB
Volume: 37
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.91739

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