✦ LIBER ✦

Oxygen precipitation in Czochralski grown silicon heat treated at 550 °C

✍ Scribed by Cheung, J; Messoloras, S; Rycroft, S; Stewart, R J; Binns, M J

Book ID: 121199925
Publisher: Institute of Physics
Year: 2000
Tongue: English
Weight: 174 KB
Volume: 15
Category: Article
ISSN: 0268-1242
DOI: 10.1088/0268-1242/15/7/321

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Simulation of oxygen precipitation in Cz

Simulation of oxygen precipitation in Czochralski grown silicon

✍ M. Schrems; T. Brabec; M. Budil; H. Pötzl; E. Guerrero; D. Huber; P. Pongratz 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 455 KB

Oxygen precipitation and microdefects in

Oxygen precipitation and microdefects in Czochralski-grown silicon crystals

✍ Yasutake, K. ;Umeno, M. ;Kawabe, H. 📂 Article 📅 1984 🏛 John Wiley and Sons 🌐 English ⚖ 709 KB

Oxygen precipitation in nitrogen-doped C

Oxygen precipitation in nitrogen-doped Czochralski-grown silicon crystals

✍ Nakai, Katsuhiko; Inoue, Yoshiharu; Yokota, Hideki; Ikari, Atsushi; Takahashi, J 📂 Article 📅 2001 🏛 American Institute of Physics 🌐 English ⚖ 908 KB

Structure of platelike oxygen precipitat

Structure of platelike oxygen precipitate in Czochralski-grown silicon

✍ Xiao Zhigang; Qin Luchang; Lin Xiwei 📂 Article 📅 1987 🏛 Elsevier Science ⚖ 397 KB

Precipitation and redistribution of oxyg

Precipitation and redistribution of oxygen in Czochralski‐grown silicon

✍ Shimura, Fumio; Tsuya, Hideki; Kawamura, Tsutomu 📂 Article 📅 1980 🏛 American Institute of Physics 🌐 English ⚖ 592 KB

Photoluminescence characterization of th

Photoluminescence characterization of thermal defects in Czochralski grown silicon heat treated at 600°C

✍ V.V. Emtsev; A.V. Mudryi; V.V. Emtsev Jr.; D.S. Poloskin; G.A. Oganesyan 📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 201 KB

In the present work new results on the formation of oxygen-and carbon-related luminescence centers in Cz-Si heat treated at T ¼ 600 C are reported. Some characteristic features of thermal defect formation dependent on the heat treatment regimes were studied. At the early stages of heat treatment two