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Polymethylmethacrylate langmuir-blodgett films for high resolution electron beam resist

โœ Scribed by Lu Wu; Gu Ning; Wei Yu; Shen Haoying; Zhang Lan


Book ID
112825888
Publisher
SP Science Press
Year
1994
Tongue
English
Weight
395 KB
Volume
11
Category
Article
ISSN
0217-9822

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