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High-resolution electron beam lithography of PMMA derivatives with Langmuir-Blodgett films

✍ Scribed by Chang Nam Kim; Dong Woo Kang; Eung Ryul Kim; Haiwon Lee


Book ID
117541113
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
271 KB
Volume
85
Category
Article
ISSN
0379-6779

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