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Electron-beam resists from Langmuir-Blodgett films of poly(styrene/maleic anhydride) derivatives

โœ Scribed by R. Jones; C.S. Winter; R.H. Tredgold; P. Hodge; A. Hoorfar


Publisher
Elsevier Science
Year
1987
Tongue
English
Weight
946 KB
Volume
28
Category
Article
ISSN
0032-3861

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