Characterization of an N-octadecylacrylamide Langmuir-Blodgett film for application as an electron beam resist

✍ Scribed by Tokuji Miyashita; Minoru Matsuda

• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 42 KB
• Volume: 168
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(89)90025-4