Dry formation of a fatty acid crystallized thin film and application as an electron beam resist

✍ Scribed by Hisato Kato; Masahiro Tawata; Shinzo Morita; Shuzo Hattori

• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 596 KB
• Volume: 180
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(89)90087-4